Customization: | Available |
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Usage: | Semiconductor |
Type: | Plate Exposure |
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Air cooling type | 2KWx2pcs |
Water cooling type | 5KWx2pcs |
Exposing size | 850x850mm |
Table size | 900x900mm |
Exposing light | Iodine gallium lamp |
Light uniformity | >85% |
Exposing Tolerance | +/- 0.02mm |
Outsize | 2100x1200x1900mm |
Cooling system | Air cooling or Water cooling |
Control system | PLC control panel |